Helios NanoLab 660


User regulations of electron microscopes and XRM facilities (German only)

  • Ultra-high resolution ElstarTMelectron column with monochromator
  • Resolution ~1 nm at 1-30 kV
  • Retractable STEM and different SE & BSE detectors for enhanced imaging contrasts
  • High-resolution TomahawkTM ion column
  • Gas Injection System for Pt, C and XeF2
  • EasyLift NanoManipulator
  • Kleindiek micromanipulator
  • Oxford X-MaxN EDX detector (150 mm2 SDD)
  • In-chamber plasma cleaner